Plasma electronics: applications in microelectronic device fabrication
by T. Makabe, Z. Petrovic
- Accession Number
- KNULMS781
- Title
- Plasma electronics: applications in microelectronic device fabrication
- Author
- T. Makabe, Z. Petrovic
- Year
- 2006
- Subject
- Pathology
- ISBN / EISBN
- 750309768
- Medium
- Electronic
- Availability
- yes